VACUUM VALVE

摘要

The invention relates to a vacuum valve having a screw element for coupling a first component of the vacuum valve to a second component. The screw element has a force transfer surface section between a threaded surface section having a first thread and an engagement surface section, arranged in a first gas region, for a tool. The first and second component are coupled by a thread engagement, carried out through a passage hole in the first component, between the first thread and a second thread assigned to the second component. The screw element has a sealing surface section between the threaded surface section and the engagement surface section. Between the sealing surface section and a sealing face of the first component, a sealing seal element is arranged so the first gas region is separated in a gas-tight or particle-tight manner from a third gas region.

主权项

1. A vacuum valve having
a closure member, which has a closure face for the gas-tight closing of an opening connecting a first gas region to a second gas region, a displacement arm, on which the closure member is arranged, a drive unit, which is mechanically coupled to the displacement arm and which is designed in such a way that the closure member in the first gas region can be displaced back and forth, by displacement of the displacement arm by means of the drive unit, between
an open position, in which the closure member releases the opening, anda closed position, in which the closure face closes the opening in a gas-tight manner and separates the first gas region from the second gas region in a gas-tight manner, and a screw element for connecting a first component part of the vacuum valve, which component part is arranged at least in part in the first gas region, to a second component part in a mechanically coupling manner, wherein the first component part or the second component part is mechanically coupled to the drive unit,wherein
the screw element
has a threaded surface portion, on which a first thread extending about a geometric first axis is formed,an engagement surface portion, on which an engagement of this design is formed, such that the screw element is rotatable and/or secured in a form-fitting manner against rotation about the first axis, in particular by means of a tool which can engage in a form-fitting manner in the engagement, anda force transfer surface portion, which is arranged between the threaded surface portion and the engagement surface portion and which points at least in part in a screw closing direction extending along the first axis, the first component part has a through-hole extending along the first axis, the first component part and the second component part can be mechanically coupled in a form-fitting manner by
a threaded engagement, carried out through the through-hole, between the first thread of the screw element and a second thread assigned to the second component part, and byresting the force transfer surface portion on a contact face of the first component part surrounding the through-hole and pointing at least in part in a screw opening direction, which is opposite the screw closing direction, the engagement surface portion of the screw element is arranged in the first gas region,wherein,
the screw element has a sealing surface portion,
which is arranged between the threaded surface portion and the engagement surface portion, andwhich separates the threaded surface portion and the engagement surface portion from one another, andwhich encloses the first axis, the first component part has, adjacently to the contact face, a sealing face enclosing the through-hole and a sealing seal element, enclosing the first axis, is arranged between the sealing surface portion of the screw element and the sealing face of the first component part in such a way that the first gas region is separated from a third gas region, in which the threaded surface portion is arranged.