| 摘要 |
<p>A wafer transferring robot is provided to reduce a necessary time for manufacturing a semiconductor by installing a plurality of wafer stands for processing a plurality of wafers at the same time. A wafer transporting robot(100) comprises a rectangular frame(110), a base body(120), a height control body(130), and a wafer transfer part(140). The height control body comprises a housing(133), a first step frame(131), and a second end frame(132). The housing is inserted through opening, and a supporting plate of the upper housing part is supported by the base body. The wafer transfer part(140) is arranged on the top of the height control body and is rotated with the wafer transfer part rotary motor(150) while including a plurality of wafer supports, which support each wafer.</p> |
