| 摘要 |
PROBLEM TO BE SOLVED: To provide a resistivity measuring device capable of measuring a resistivity of a wafer with stable accuracy.SOLUTION: A resistivity measuring device is configured to perform: a step S1 of bringing a plurality of probes into contact with a wafer; a step S2 of determining whether a voltage value or a resistance value between the probes is in a prescribed range; a step S3 of applying a high voltage having a higher voltage level than a voltage level when a normal resistivity is measured if the voltage value or resistance value between the probes is not in the prescribed range; and a step S4 of measuring the normal resistivity if the voltage value or resistance value between the probes is in or falls in the prescribed range (step S2). |
