| 摘要 |
PROBLEM TO BE SOLVED: To provide a black ceramic excellent in both of toughness and performance for prevention of electrostatic discharge, having a moderately low conductivity, and well-balanced strength, toughness, stiffness, and hardness, for use in next generation tools in manufacturing processes of semiconductors and electronic components such as a manufacturing process of electronic circuits.SOLUTION: The black ceramic excellent in both of toughness and performance for prevention of electrostatic discharge has a basic structure including ceramic nanoparticles of conductive carbide dispersed in an insulating oxide ceramic. When the ceramic nanoparticles of conductive carbide are added to the insulating oxide ceramic, the amount of the ceramic nanoparticles of conductive carbide to be added to the insulating oxide ceramic is set to an amount which is 5 to 25% less than a threshold level. Nanoparticles of semiconductor material is further added thereto, such that the total amount of the ceramic nanoparticles of conductive carbide and the semiconductor material reaches a level equal to or higher than the threshold. |
