| 摘要 |
PROBLEM TO BE SOLVED: To provide an ink jet head which enhances the yield of connection to a flexible wiring board and has a small parasitic capacitance at a contact electrode part. SOLUTION: When a connection electrode to a drive circuit side is to be formed in a photolitho process, a hollow 108 is formed by an etching method after a resist opening port 121 as the contact electrode is formed. Then, a low permittivity material layer 109 and the contact electrode 107 are formed by a vapor deposition method. The contact electrode can be formed well adaptable to the hollow 108 when a resist is separated by a lift-off method.
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