| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a container for housing pellicle which enables takes out the pellicle therefrom without man power, that is, in an unmanned state and automatically stripping a protective film intervention which is disposed on the pellicle. SOLUTION: This container for housing pellicle, which comprises a tray 6 and a cover enables housing, storing and conveying of the pellicle A, consisting of a pellicle frame 1, a pellicle film 3 and a protective film 5 having an ear part 5a. Further, this container for housing pellicle ahs a structure, which is constituted by perforatedly disposing a first fixture hole 7 which enables insertion of a fixture 11 for supporting pellicle frame on the prescribed position of the tray 6 and a second fixture hole 8, which enables insertion of a fixture 12 for suction clamping which enables clamping of the ear part 5a of the protective film 5 by suction, respectively.</p> |
