发明名称 BEAM PROPAGATION CAMERA AND METHOD FOR LIGHT BEAM ANALYSIS
摘要 A beam propagation camera has at least one beam-splitting optical arrangement (240) configured to split a beam, which is incident on the beam-splitting optical arrangement along an optical axis (OA) of the beam propagation camera, into a multiplicity of sub-beams, and a sensor arrangement (250) configured to detect the sub-beams. The beam-splitting optical arrangement has a diffractive structure (241) configured such that at least two of the sub-beams are spatially separated from one another on the sensor arrangement and have respective foci longitudinally offset from one another along the optical axis.
申请公布号 EP3100011(A1) 申请公布日期 2016.12.07
申请号 EP20140825334 申请日期 2014.12.22
申请人 Carl Zeiss SMT GmbH 发明人 MANGER, Matthias
分类号 G01J1/42;B23K26/30;G01J1/04;G02B27/10 主分类号 G01J1/42
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