| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece processing method capable of checking a kerf of a second cut groove formed by cutting a groove bottom of a first cut groove when cutting the workpiece using two cutting devices.SOLUTION: A workpiece processing method includes the steps of: forming a second cut groove having a width equal to or narrower than a width of a first cut groove by cutting a bottom of each first cut groove by second cutting means of a second cutting device (second cutting step); setting a cutting line 17 for checking a second cut groove in an outer peripheral excess region 13 in which the first cut groove of the workpiece is not formed; and forming a groove for checking the second cut groove by cutting the cutting line 17 for checking the second cut groove according to a prescribed timing when the second cutting step is being performed, imaging the groove for checking the second cut groove by second imaging means with a second reference line of the second cutting device to measure a positional relationship with the second reference line, and checking the second cut groove formed in the second cutting step on the basis of the measurement results. |
