发明名称 搬送機構の位置決め方法、被処理体の位置ずれ量算出方法及び搬送機構のティーチングデータの修正方法
摘要 In a method for positioning a transfer unit including, support pins for supporting object, and a pick having at a leading end thereof a detection unit for detecting presence or absence of the object, a height reference position of the pick is determined by detecting an upper edge of one of the support pins by the detection unit. A forward moving angle of the pick is corrected by obtaining a deviation angle between a radial direction of the mounting table passing through the corresponding support pin and a forward moving direction of the pick. A forward movement starting point of the pick is corrected by obtaining a horizontal deviation distance between the radial direction of the mounting table and the forward moving direction of the pick. A forward moving reference amount of the pick is obtained from coordinates of the corresponding support pin.
申请公布号 JP6040757(B2) 申请公布日期 2016.12.07
申请号 JP20120279632 申请日期 2012.12.21
申请人 東京エレクトロン株式会社 发明人 久保寺 政人;菊嶋 博人;山口 博史;佐々木 義明;ユー メンヤウ
分类号 H01L21/68 主分类号 H01L21/68
代理机构 代理人
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