Capacitive humidity sensor

摘要

Provided is a capacitive humidity sensor. The capacitive humidity sensor includes an upper electrode disposed on a first plane, a plurality of first electrodes included in the upper electrode, a plurality of second electrodes disposed between the first electrodes, and a humidity sensitive layer surrounding the second electrodes.

主权项

1. A capacitive humidity sensor, comprising:
an upper electrode disposed on a first plane comprising
first electrodes;discrete second electrodes disposed on the first plane and between each of a pair of adjacent first electrodes; anda humidity sensitive layer disposed between each of a pair of adjacent second electrodes.