| 摘要 |
PROBLEM TO BE SOLVED: To process a noncrystalline silicon film and a metal electrode simultaneously, by irradiating an integrated solar cell provided with a substrate, a transparent conductive film, a noncrystalline silicon film having an optical active layer, and a metal electrode with a laser beam having nonuniform intensity distribution, in the section. SOLUTION: A transparent conductive film 2 is formed on a glass substrate 1, and is divided into an arbitrary number of stages into strips. After a noncrystalline silicon film 3 having a pin junction inside is deposited on it, a rear electrode 4 is formed on the film 3. A laser beam L to be used for processing is formed, and its intensity distribution in the section is nonuniformized into strong and weak parts by an optical means. The output in the strong part La is about 40-50mW, and that in the weak part Lb is about 30-40mW. Since it becomes possible to perform connection in the strong distribution part, and separation in the weak distribution part, it becomes possible to simultaneously perform the processing of the noncrystalline silicon film and the metal electrode. |
