发明名称 Direct Write Sensors
摘要 A method of making an acoustic wave sensor includes the steps of providing a piezoelectric substrate layer and printing on the substrate layer a sensor layer comprising a first interdigitated acoustic wave transducer, a sensing film, and positioned on an opposing side of the sensing film from the first interdigitated acoustic wave transducer at least one selected from the group consisting of a second interdigitated acoustic wave transducer and a Bragg reflector. An insulation layer can be printed. An antenna can be printed in an antenna layer, and the insulation layer can be interposed between the antenna layer and the sensor layer. An electrical connection can be printed between the antenna and the first interdigitated acoustic wave transducer. An acoustic wave sensor is also disclosed.
申请公布号 US2017070204(A1) 申请公布日期 2017.03.09
申请号 US201615246907 申请日期 2016.08.25
申请人 UT-Battelle, LLC 发明人 McIntyre Timothy J.
分类号 H03H9/02;H01L41/314 主分类号 H03H9/02
代理机构 代理人
主权项 1. A method of making an acoustic wave sensor, comprising the steps of: providing a piezoelectric substrate layer; printing on the substrate layer a sensor layer comprising a first interdigitated acoustic wave transducer, and at least one other feature selected from the group consisting of a sensing film, an interdigitated acoustic wave transducer, and a Bragg reflector.
地址 Oak Ridge TN US