发明名称 STRUCTURE AND FILM FORMATION METHOD
摘要 Provided is a structure configured such that even when resin, such as methacryl resin, exhibiting a low adhesion to a metal thin film is used, the resin and the metal thin film are firmly stacked in close contact with each other, and a film formation method capable of manufacturing a structure in which a metal thin film is, with a high adhesion, formed on a resin work exhibiting a low adhesion to the metal thin film, wherein the structure is configured such that an Al thin film 102 is, by sputtering, formed on a work W made of methacryl resin to form a stack of the work W and the Al thin film 102, and has a mixed region 101 of Al, Si, O, and C between the work W and the Al thin film 102. In the mixed region 101, Al is covalently bound to any one of Si, O, and C, or Al, Si, O, and C form a diffusion mixed layer.
申请公布号 US2017067142(A1) 申请公布日期 2017.03.09
申请号 US201515115563 申请日期 2015.01.20
申请人 Shimadzu Corporation 发明人 ICHIOKA Akina;YOSHIMUTA Toshinori;TOKUDA Satoshi;IMAI Daisuke;OZAKI Satoru;TOKUTAKE Yuu
分类号 C23C14/02;G02B5/08;C23C16/505;C23C14/20;C23C16/40 主分类号 C23C14/02
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