发明名称 |
A GAS LEAK DETECTOR AND A METHOD OF DETECTING A LEAK OF GAS |
摘要 |
A gas leak detector for detecting gas leakage from a flow path between a first flow restriction and a second flow restriction to gas flowing in the flow path, the first flow restriction upstream and spaced apart from the second flow restriction, the gas leak detector comprising: a first sensor device for sensing a first difference between a first pressure of gas upstream of the first flow restriction and a second pressure of gas inside or downstream of the first flow restriction in the flow path and to generate on the basis of the first difference a first electrical signal indicative of a first mass flow rate of gas through the first flow restriction; a second sensor device for sensing a second difference between a third pressure of gas upstream of the second flow restriction and a fourth pressure of gas inside or downstream of the second flow restriction in the flow path to generate on the basis of the second difference a second electrical signal indicative of a second mass flow rate through the second flow restriction; and a comparator for comparing a first magnitude of the first electrical signal and a second magnitude of the second electrical signal and generating an alarm signal if a difference between the first magnitude and the second magnitude is greater than a threshold value and/or generating a safe signal if the difference between the first magnitude and the second magnitude is lower than the threshold value. |
申请公布号 |
WO2017036830(A1) |
申请公布日期 |
2017.03.09 |
申请号 |
WO2016EP69772 |
申请日期 |
2016.08.22 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
RENCKENS, Theodorus, Johannes, Antonius;VAN DEN HEUVEL, Nils-Peter, Martin;WERNAART, Wilhelmus, Antonius;KUIJPER, Anthonie |
分类号 |
G01F1/88;G01M3/28;G03F7/00 |
主分类号 |
G01F1/88 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|