发明名称 A GAS LEAK DETECTOR AND A METHOD OF DETECTING A LEAK OF GAS
摘要 A gas leak detector for detecting gas leakage from a flow path between a first flow restriction and a second flow restriction to gas flowing in the flow path, the first flow restriction upstream and spaced apart from the second flow restriction, the gas leak detector comprising: a first sensor device for sensing a first difference between a first pressure of gas upstream of the first flow restriction and a second pressure of gas inside or downstream of the first flow restriction in the flow path and to generate on the basis of the first difference a first electrical signal indicative of a first mass flow rate of gas through the first flow restriction; a second sensor device for sensing a second difference between a third pressure of gas upstream of the second flow restriction and a fourth pressure of gas inside or downstream of the second flow restriction in the flow path to generate on the basis of the second difference a second electrical signal indicative of a second mass flow rate through the second flow restriction; and a comparator for comparing a first magnitude of the first electrical signal and a second magnitude of the second electrical signal and generating an alarm signal if a difference between the first magnitude and the second magnitude is greater than a threshold value and/or generating a safe signal if the difference between the first magnitude and the second magnitude is lower than the threshold value.
申请公布号 WO2017036830(A1) 申请公布日期 2017.03.09
申请号 WO2016EP69772 申请日期 2016.08.22
申请人 ASML NETHERLANDS B.V. 发明人 RENCKENS, Theodorus, Johannes, Antonius;VAN DEN HEUVEL, Nils-Peter, Martin;WERNAART, Wilhelmus, Antonius;KUIJPER, Anthonie
分类号 G01F1/88;G01M3/28;G03F7/00 主分类号 G01F1/88
代理机构 代理人
主权项
地址