| 摘要 |
<p>A capacitance based, high resolution, incrementally encoding, position measuring system employs an array of identical replicated electrodes that are driven in unison from an RF source and mounted in proximity to a patterned monolithic reference ground plan of arbitrary size. Motion of such position-sensing arrays is monitored by measuring both the sums and the differences of the electrode displacement currents in such a way as to provide incrementally encoding position signals in both one and two dimensions together with a continuous measurement of the height of the sensor array above the patterned ground plane. In various modifications, the system and methods are applied both to one dimensional linear, as well as to two dimensional planar and two dimensional cylindrical motion measurement and control. Various techniques for eliminating the effects of spurious capacitances are also disclosed.</p> |
