发明名称 |
FABRICATION METHODS FOR THERMOELECTRIC PHONONIC STRUCTURES |
摘要 |
Phononic structures, devices related to phononic structures, and methods related to fabrication of the phononic structures are described. The phononic structure can include a sheet of material, where the sheet of material can include a plurality of regions. Adjacent regions in the sheet of material can have dissimilar phononic patterns. |
申请公布号 |
US2017069818(A1) |
申请公布日期 |
2017.03.09 |
申请号 |
US201615339820 |
申请日期 |
2016.10.31 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
MITROVIC Slobodan;YU Jen-Kan;HEATH James R. |
分类号 |
H01L35/34;H01L35/32 |
主分类号 |
H01L35/34 |
代理机构 |
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代理人 |
|
主权项 |
1. A method for fabricating a phononic structure, comprising:
doping a sheet of a first material; defining a plurality of regions in the sheet, wherein adjacent regions have dissimilar phononic patterns; and etching the sheet to obtain the plurality of regions, thus fabricating the phononic structure. |
地址 |
Pasadena CA US |