发明名称 FABRICATION METHODS FOR THERMOELECTRIC PHONONIC STRUCTURES
摘要 Phononic structures, devices related to phononic structures, and methods related to fabrication of the phononic structures are described. The phononic structure can include a sheet of material, where the sheet of material can include a plurality of regions. Adjacent regions in the sheet of material can have dissimilar phononic patterns.
申请公布号 US2017069818(A1) 申请公布日期 2017.03.09
申请号 US201615339820 申请日期 2016.10.31
申请人 CALIFORNIA INSTITUTE OF TECHNOLOGY 发明人 MITROVIC Slobodan;YU Jen-Kan;HEATH James R.
分类号 H01L35/34;H01L35/32 主分类号 H01L35/34
代理机构 代理人
主权项 1. A method for fabricating a phononic structure, comprising: doping a sheet of a first material; defining a plurality of regions in the sheet, wherein adjacent regions have dissimilar phononic patterns; and etching the sheet to obtain the plurality of regions, thus fabricating the phononic structure.
地址 Pasadena CA US