MIRROR INCLUDING POLYCRYSTALLINE DIAMOND BODY FOR USE WITH A MOTOR, SCANNING SYSTEMS INCLUDING THE SAME, AND RELATED METHODS

摘要

Mirrors for a deflection unit in a scanning system, scanning systems using such mirrors, and methods of manufacturing such mirrors are disclosed. In an embodiment, a mirror for a deflection unit in a laser system includes a sintered polycrystalline diamond body including a plurality of randomly oriented diamond grains defining a plurality of interstitial regions. At least a portion of the interstitial regions includes a material disposed interstitially therein. The mirror includes a reflective surface formed at least partially from the sintered polycrystalline diamond body or provided thereon. The reflective surface exhibits a surface roughness of less than about 50 nm Rrms.

主权项

1. A mirror for a deflection unit in a scanning system, the mirror comprising:
a sintered polycrystalline diamond body configured to be operably coupled to a motor, the sintered polycrystalline diamond body including a plurality of randomly oriented diamond grains defining a plurality of interstitial regions, at least a portion of the interstitial regions including a material disposed interstitially therein; and a reflective surface formed at least partially from the sintered polycrystalline diamond body or provided thereon, the reflective surface exhibiting a surface roughness of less than about 50 nm Rrms.