| 摘要 |
<p>PURPOSE:To enable a semiconductor device production line to be enhanced in device processing efficiency and lessened in control man-hour of production specifications. CONSTITUTION:A condition table that the operating conditions of a manufacturing process are defined in matrix for each production specification is formed in a condition table completion 1, the condition table is registered as a pattern set in a pattern set registration 4, and a lot of wafers is changed in process on the basis of manufacturing specifications on the condition table (process on the basis of change designation). The lot is set in number of wafers for each product specification (wafer designation). A lot progress control mechanism is made to divide or unify a lot conforming to the manufacturing specifications of the condition table (unification division control).</p> |
