| 发明名称 |
MEMS DEVICE, LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, MANUFACTURING METHOD OF MEMS DEVICE, AND MANUFACTURING METHOD OF LIQUID EJECTING HEAD |
| 摘要 |
A MEMS device includes a first substrate and a second substrate that is disposed laminated on the first substrate and has a piezoelectric element on the first substrate side, in which the first substrate and the second substrate are substantially the same size, and in planar view, an end of the first substrate and an end of the second substrate are disposed at substantially the same position. |
| 申请公布号 |
US2017066241(A1) |
申请公布日期 |
2017.03.09 |
| 申请号 |
US201615258041 |
申请日期 |
2016.09.07 |
| 申请人 |
SEIKO EPSON CORPORATION |
发明人 |
NAGANUMA Yoichi;HIRAI Eiju;HAMAGUCHI Toshiaki;TAKABE Motoki |
| 分类号 |
B41J2/14;B41J2/16;B81C3/00 |
主分类号 |
B41J2/14 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A MEMS device comprising:
a first substrate; and a second substrate that is disposed laminated on the first substrate and has a functional element on the first substrate side, wherein the first substrate and the second substrate are substantially the same size, and in planar view, an end of the first substrate and an end of the second substrate are disposed at substantially the same position. |
| 地址 |
Tokyo JP |
