ARTICLE-HOLDING DEVICE, EXPOSURE DEVICE, METHOD FOR MANUFACTURING FLAT PANEL DISPLAY, METHOD FOR MANUFACTURING DEVICE, METHOD FOR HOLDING ARTICLE, AND EXPOSURE METHOD

摘要

A mask stage device (14) for holding a mask (M) is provided with: a support block (50) for supporting the mask (M) from below; a suction pad (46) that is supported by the support block (50), the suction pad (46) having a holding surface for holding the surface of the mask (M), which is bent by the weight of the mask (M) itself, the suction pad (46) moving the holding surface so as to follow the surface of the bent mask (M), and holding the mask; and a suction port (46b) for suctioning the bent mask (M) to the holding surface.