HYDROGEN GAS RECOVERY SYSTEM AND HYDROGEN GAS SEPARATION AND RECOVERY METHOD

摘要

This hydrogen gas recovery system includes: a condensing and separating device (A) that condenses and separates chlorosilanes from reaction exhaust gases, which includes hydrogen, from a polycrystalline silicon manufacturing step; a compressing device (B) that compresses the reaction exhaust gases including hydrogen; an absorbing device (C) that contacts the reaction exhaust gases including hydrogen with an absorbing liquid to absorb and separate hydrogen chloride; a first adsorbing device (D) that includes an adsorption tower which is filled with activated carbon for adsorbing and removing methane, hydrogen chloride, and a part of the chlorosilanes that are included in the reaction exhaust gases including hydrogen; a second adsorbing device (E) that includes an adsorption tower which is filled with synthetic zeolite that adsorbs and removes the methane included in the reaction exhaust gases including hydrogen; and a gas line (F) that recovers purified hydrogen gas in which concentration of methane has been reduced.