TUBE-TYPE LENS, OPTICAL EMISSION SPECTROSCOPY (OES) APPARATUS INCLUDING THE TUBE-TYPE LENS, PLASMA MONITORING SYSTEM INCLUDING THE OES APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY USING THE PLASMA MONITORING SYSTEM

摘要

Provided are a tube-type lens usable for accurately detecting a plasma state in a plasma process, an optical emission spectroscopy (OES) apparatus including the tube-type lens, a plasma monitoring system including the OES apparatus, and a method of manufacturing a semiconductor device by using the plasma monitoring system. The tube-type lens includes: a cylindrical tube; a first lens disposed at an entrance of the cylindrical tube, on which light is incident, the first lens including a central portion which prevents transmission of the light and a second lens disposed at an exit of the cylindrical tube, from which the light exits.

主权项

1. A tube-type lens comprising:
a cylindrical tube; a first lens configured to receive incident light into the cylindrical tube, the first lens being disposed at an entrance of the cylindrical tube, the first lens including a central portion configured to prevent transmission of light incident therethrough; and a second lens configured to permit light to exit from the tube, the second lens being disposed at an exit of the cylindrical tube.