| 摘要 |
A hard coating 24 coated on the surface of a tool base material 30 is configured so as to have a total film thickness of 0.5-20 µm and has alternately laminated therein, by physical vapor deposition, an A layer 34 and a nanolayer-alternated layer 40 having a B layer 36 and a C layer 38 alternately laminated therein at a nano-order thicknesses. The A layer 34 has a thickness of 50-1,000 nm and is an AlCr(SiC) nitride having a compositional formula of [Al1-W-XCrW(SiC)X]N, an atomic ratio W of 0.20-0.80, and an atomic ratio X of 0.01-0.20. The B layer 36 has a thickness of 1-100 nm and is a TiAl nitride having a compositional formula [Ti1-YAlY]N and an atomic ratio Y of 0.30-0.85. The C layer 38 has a thickness of 1-100 nm and is a Ti(SiC) nitride having a compositional formula [Ti1-Z(SiC]Z]N and an atomic ratio Z of 0.05-0.45. The nanolayer-alternated layer 40 has a thickness of 50-1,000 nm. |
