LASER RESEALING WITH STRESS-REDUCING PRESTRUCTURING

摘要

A method for manufacturing a micromechanical component including a substrate and a cap connected to the substrate and together with the substrate enclosing a first cavity, a first pressure prevailing and a first gas mixture with a first chemical composition being enclosed in the first cavity: in a first method step, an access opening, connecting the first cavity to surroundings of the micromechanical component, being formed in the substrate or in the cap; in a second method step, the first pressure and/or the first chemical composition being adjusted in the first cavity; in a third method step, the access opening being sealed by introducing energy and heat into an absorbing part of the substrate or the cap with the aid of a laser; in a fourth method step, a recess being formed, and/or an elevation being formed, and/or a reflection area being formed, and/or an absorption area being formed.

主权项

1. A method for manufacturing a micromechanical component including a substrate and a cap connected to the substrate and together with the substrate enclosing a first cavity, a first pressure prevailing and a first gas mixture with a first chemical composition being enclosed in the first cavity, the method comprising:
in a first step, forming an access opening, connecting the first cavity to surroundings of the micromechanical component, in the substrate or in the cap; in a second step, adjusting at least one of the first pressure and the first chemical composition, in the first cavity; in a third step, sealing the access opening by introducing energy and heat into an absorbing part of the substrate or the cap with the aid of a laser; and in a fourth step, at least one of:
(i) forming a recess in a surface of the substrate or of the cap, facing away from the first cavity in the area of the access opening for accommodating a material area of the substrate or the cap converted into a liquid aggregate state in the third step,(ii) forming an elevation on the surface of the substrate or of the cap facing away from the first cavity in the area of the access opening to guide the material area of the substrate or the cap converted into a liquid aggregate state in the third step away from the access opening and in parallel to the surface,(iii) forming a reflection area on or in the surface of the substrate or of the cap facing away from the first cavity in the area of the access opening for increased reflection, in contrast to the remaining surface, of laser radiation used in the third step for introducing the energy and heat, and(iv) forming an absorption area on or in the surface of the substrate or of the cap facing away from the first cavity in the area of the access opening for increased absorption, in contrast to the remaining surface, of the laser radiation used in the third step for introducing the energy and heat.