COATING APPARATUS AND METHOD OF FORMING COATING LAYER USING THE SAME

摘要

A coating apparatus includes: a nozzle having a nozzle front end configured to spray a coating solution and a head configured to store the coating solution; a movement axis configured to cause the nozzle to move back and forth in a straight line; a rotating connection member configured to connect the movement axis with the nozzle and allow the nozzle to rotate; a stage disposed under the movement axis; and a cleaning means disposed at an end of the movement axis, and having a nozzle front end insertion unit in a concave shape of the nozzle front end and a base fixing the insertion unit, wherein the nozzle is fixed in a normal direction of a surface of the stage by the movement axis, moves back and forth in an extension direction of the movement axis, and rotates with respect to the movement axis.

主权项

1. A method of forming a coating layer using a coating apparatus comprising a nozzle having a nozzle front end configured to spray a coating solution and a head configured to store the coating solution, a movement axis configured to cause the nozzle to move back and forth in a straight line, a rotating connection member configured to connect the movement axis with the nozzle and allow the nozzle to rotate, a stage disposed under the movement axis, and a cleaning means disposed at an end of the movement axis and having a nozzle front end insertion unit in a concave shape of the nozzle front end and a base fixing the insertion unit, wherein the nozzle is fixed in a normal direction of a surface of the stage by the movement axis, moves back and forth in an extension direction of the movement axis, and rotates with respect to the movement axis, the method comprising:
moving the nozzle front end to the one end of the movement axis to dispose the nozzle front end to face the nozzle front end insertion unit of the cleaning means and be parallel to the movement axis; moving the nozzle front end insertion unit up to closely adhere the nozzle front end insertion unit close to the nozzle front end; moving the nozzle front end along the movement axis to clean the nozzle front end; floating a substrate in the air to mount the substrate over the stage to be spaced apart from the stage by a predetermined distance; rotating the cleaned nozzle front end to be aligned with one end of the substrate mounted over the stage and to be perpendicular to the movement axis; a dwelling operation of pre-dispensing a coating solution at the nozzle front end to fill a gap between the nozzle front end and the substrate with the coating solution; and spraying the coating solution while moving the nozzle front end along the movement axis at a predetermined speed to form a coating layer on the substrate.