发明名称 Semiconductor Constructions
摘要 Some embodiments include methods of forming interconnects through semiconductor substrates. An opening may be formed to extend partway through a semiconductor substrate, and part of an interconnect may be formed within the opening. Another opening may be formed to extend from a second side of the substrate to the first part of the interconnect, and another part of the interconnect may be formed within such opening. Some embodiments include semiconductor constructions having a first part of a through-substrate interconnect extending partially through a semiconductor substrate from a first side of the substrate; and having a second part of the through-substrate interconnect extending from a second side of the substrate and having multiple separate electrically conductive fingers that all extend to the first part of the interconnect.
申请公布号 US2017125342(A1) 申请公布日期 2017.05.04
申请号 US201715407205 申请日期 2017.01.16
申请人 Micron Technology, Inc. 发明人 Wood Alan G.;Ireland Philip J.
分类号 H01L23/522;H01L21/768;H01L23/528 主分类号 H01L23/522
代理机构 代理人
主权项
地址 Boise ID US
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