LINEAR ACTUATOR

摘要

In a magnetic drive linear actuator, a load attachment portion is fixed to the lower side portion of the rectangular tubular coil frame of a mover, and a light-emitting portion of a position detection portion for detecting the movement position of the mover is fixed to the upper side portion of the coil frame. The load attachment portion and the upper side portion of the coil frame are mutually coupled through beam portions bridged there between. This makes it possible to prevent or suppress the behaviors of the load attachment portion and light-emitting portion from being shifted to each other during high-acceleration driving of the mover, thereby improving the responsiveness and positioning accuracy of the linear actuator.

主权项

1. A linear actuator comprising:
a tubular mover having a tubular coil frame and a drive coil wound onto the coil frame; a stator having a magnet for generating thrust force to move the mover along a linear path parallel to a center axis of the mover in relation to the drive coil through which an excitation current flows; a linear motion bearing for supporting the mover movably along the linear path at an inside of the coil frame; a first frame section and a second frame section mutually opposed to each other in the coil frame in a state in which the linear motion bearing is sandwiched between the first and second frame sections; a load attachment portion attached to the first frame section; a position detection portion having a moving-side detection portion attached to the second frame section, the position detection portion detecting a movement position of the mover on the linear path; and beam portions bridging between the first frame section or the load attachment portion, and the second frame section or the moving-side detection portion.