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发明名称
LASER PVD DEVICE
摘要
申请公布号
JPH0336264(A)
申请公布日期
1991.02.15
申请号
JP19890168022
申请日期
1989.06.29
申请人
ULVAC JAPAN LTD
发明人
YOSHIKAWA HIDEJI;FUKAZAWA HIROYUKI
分类号
C23C14/28;H01L21/203;H01L21/428;H01S3/00
主分类号
C23C14/28
代理机构
代理人
主权项
地址
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