发明名称 Film stack including adhesive layer
摘要 An example provides an apparatus including a substrate, a metal layer, and an adhesive layer adhered between the substrate and the metal layer, the adhesive layer comprising indium oxide, tin oxide, gallium oxide, indium-tin oxide, indium-gallium oxide, tin-gallium oxide, or indium-tin-gallium oxide.
申请公布号 US9636902(B2) 申请公布日期 2017.05.02
申请号 US201313873932 申请日期 2013.04.30
申请人 HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. 发明人 Abbott, Jr. James Elmer;Mardilovich Peter;Hoffman Randy
分类号 H01L41/18;B32B38/08;B41J2/16;H01L41/08;H01L41/09;B41J2/14;B32B37/12;B32B37/24;B32B38/00 主分类号 H01L41/18
代理机构 HP Inc—Patent Department 代理人 HP Inc—Patent Department
主权项 1. An apparatus comprising: a substrate; a metal layer; an adhesive layer adhering the substrate and the metal layer, wherein the adhesive layer comprises an indium-tin oxide having an In:Sn atomic ratio of 9:1, wherein a first surface of the adhesive layer is in direct contact with a surface of the metal layer and a second surface of the adhesive layer is in direct contact with a surface of the substrate; and a piezoelectric layer, wherein the piezoelectric layer is directly disposed on the metal layer such that the metal layer is between the adhesive layer and the piezoelectric layer.
地址 Houston TX US