发明名称 |
Process for plasma treatment employing ceramic-filled polymer composite parts |
摘要 |
Internal components of plasma reactors are composed of a toleratable, ceramic filled plasma-useful polymer such as a high temperature engineering thermoplastic, preferably a polyamideimide or polybenzimidazole. The parts exhibit a low erosion rate upon exposure to plasma at low pressure. |
申请公布号 |
US9640381(B2) |
申请公布日期 |
2017.05.02 |
申请号 |
US201214111086 |
申请日期 |
2012.04.10 |
申请人 |
QUADRANT EPP AG |
发明人 |
Williams Scott Howard;Campbell Richard William;Glander Stephan |
分类号 |
C23C16/00;C23F1/00;H01L21/306;H01L21/02;H01J37/32;C08G73/14;C08L79/08;C08L71/00;C08L81/02;C08L81/06 |
主分类号 |
C23C16/00 |
代理机构 |
Brooks Kushman P.C. |
代理人 |
Brooks Kushman P.C. |
主权项 |
1. A plasma treating apparatus having a vacuum chamber adapted to receive a substrate to be plasma treated, and at least one apparatus component which is exposed to plasma in an interior of the apparatus, wherein the apparatus component is constructed of a plasma-useful polymer filled with from 5 to 40 weight percent of toleratable ceramic particles based on the total weight of plasma-useful polymer and toleratable ceramic, wherein the plasma-useful polymer comprises a recured polyamideimide polymer, and wherein the toleratable ceramic filler comprises boron nitride. |
地址 |
Lenzburg CH |