APPARATUS, SYSTEM AND METHOD OF MASS FLOW CONTROLLING FOR USE IN INTEGRATED GAS DELIVERY SYSTEM

摘要

An apparatus of mass flow controlling for use in an integrated gas delivery system, comprising an input terminal, an output terminal, a sensor unit, a flow rate control valve, and a control unit. The control unit comprises an A/D converter, a microprocessor, and a valve control circuit. The A/D converter converts an actual setting signal inputted by the input terminal into a first digital signal, and converts a flow rate detection signal outputted by the sensor unit into a second digital signal. The microprocessor further comprises a storage module, a setting signal calibration module and a calculation module. The valve control circuit generates, based on a control signal, an openness control signal, so as to control the flow rate control valve. It is concluded that the flow rate control quality is improved by the present invention.

主权项

1. A mass flow control apparatus, comprising an input terminal, an output terminal, a sensor unit, a flow rate control valve and a control unit, wherein, the control unit is used to generate an openness control signal according to an actual setting signal received by the input terminal and a flow rate detection signal outputted by the sensor unit, and output the generated openness control signal to the flow rate control valve; the control unit further comprises:
an A/D converter used to convert the actual setting signal into a first digital signal and convert the flow rate detection signal into a second digital signal; a microprocessor coupled to the A/D converter, comprises:
a storage module used to store a correcting parameter characterized an intrinsic error value of the target setting signal and the actual setting signal;a setting signal calibration module used to correct the first digital signal according to the correcting parameter;a calculation module used to generate a control signal by proceeding a calculation for a difference in the corrected first digital signal and the corrected second digital signal; a valve control circuit coupled to the microprocessor for generating the openness control signal according to the control signal, so as to control the flow rate control valve.