IMAGING OPTICAL SYSTEM, ILLUMINATION APPARATUS, AND OBSERVATION APPARATUS

摘要

In order to obtain a clear final image by preventing scratches, foreign objects, defects, or the like of an optical device from becoming superimposed on an intermediate image even when the intermediate image is formed at a position that overlaps with the optical device, this imaging optical system has a plurality of imaging lenses that form a final image and at least one intermediate image; a first phase-modulating element disposed closer to an object than any one of the intermediate images, for imparting a spatial disturbance to a wavefront of light coming from the object; and a second phase-modulating element integrated with at least one optical element of the imaging lens, wherein the second phase-modulating element cancels the spatial disturbance imparted to the wavefront of the light coming from the object by the first phase-modulating element.

主权项

1. An imaging optical system comprising:
a plurality of imaging lenses that form a final image and at least one intermediate image; a first phase-modulating element that is disposed closer to an object than any one of the intermediate images formed by the imaging lenses, and that imparts a spatial disturbance to a wavefront of light coming from the object; and a second phase-modulating element that is integrated with at least one optical element which constitutes the imaging lens and which is positioned at a vicinity of a pupil position of the imaging lens so that at least one of the intermediate images are positioned between the at least one optical element and the first phase-modulating element, wherein the second phase-modulating element cancels the spatial disturbance imparted to the wavefront of the light coming from the object by the first phase-modulating element.