Valve and fluid control apparatus

摘要

A valve includes a lower valve housing, a diaphragm, and an upper valve housing. A top surface of a piezoelectric pump is bonded to a bottom surface of the lower valve housing. A circular hole portion is provided in a central portion of a region of the diaphragm that opposes a projecting portion of the lower valve housing. The diaphragm is bonded to the upper valve housing and the lower valve housing, and a divided interior of a valve housing configures a first lower valve chamber, a second lower valve chamber, a first upper valve chamber, and a second upper valve chamber. A groove is located in a wall portion of the upper valve housing that opposes the diaphragm in the first upper valve chamber.

主权项

1. A valve comprising:
a valve housing including a first opening portion and a second opening portion; and a diaphragm including a hole portion and configured to define in the valve housing a first valve chamber configured to communicate with the first opening portion and a second valve chamber configured to communicate with the second opening portion; wherein a portion of the diaphragm surrounding the hole portion is in contact with a portion of the valve housing such that the portion of the valve housing covers the hole portion; and a flow channel formation portion is provided in at least a portion of a wall portion of the second valve chamber, a portion of the flow channel formation portion being arranged to oppose a portion of the hole portion, the flow channel formation portion defining a flow channel connecting the first valve chamber and the second valve chamber when the portion of the diaphragm surrounding the hole portion makes contact with the wall portion.