发明名称 |
COMPOSITE DEVICE WITH CYLINDRICAL ANISOTROPIC THERMAL CONDUCTIVITY |
摘要 |
An apparatus for supporting a substrate in a process chamber and regulating surface temperature of the substrate and method of making the same is provided. The apparatus includes a base support having a surface adapted to support the substrate and a heater for heating the substrate with the heater being disposed proximate the base support. The base support is made of a composite material comprising a plurality of thermally conductive arcuate members embedded within a matrix, each of the plurality thermally conductive arcuate members being arranged concentrically and defining predetermined intervals in a radial direction such that the composite material provides an anisotropic thermal conductivity in radial (ρ), azimuthal (φ) and axial (z) directions in a cylindrical coordinate system of the base support. |
申请公布号 |
US2017111958(A1) |
申请公布日期 |
2017.04.20 |
申请号 |
US201514886783 |
申请日期 |
2015.10.19 |
申请人 |
Watlow Electric Manufacturing Company |
发明人 |
Zhang Sanhong;Ptasienski Kevin;Smith Kevin R. |
分类号 |
H05B1/02;H05B3/26 |
主分类号 |
H05B1/02 |
代理机构 |
|
代理人 |
|
主权项 |
1. An apparatus for supporting a substrate in a process chamber and regulating surface temperature of the substrate, the apparatus comprising:
a base support including a surface adapted to support the substrate; and a heater for heating the substrate, the heater disposed proximate the base support, wherein the base support is made of a composite material comprising a plurality of thermally conductive arcuate members embedded within a matrix, each of the plurality thermally conductive arcuate members being arranged concentrically and defining predetermined intervals in a radial direction such that the composite material provides an anisotropic thermal conductivity in radial (ρ), azimuthal (φ) and axial (z) directions in a cylindrical coordinate system of the base support. |
地址 |
St. Louis MO US |