MULTIPLE-AXIS RESONANT ACCELEROMETERS

摘要

Multiple-axis resonant accelerometers are based on detection of resonance frequency changes of one or more electrostatically-driven resonator masses due to electrostatic gap changes under acceleration. Specifically, one or more resonator masses are configured to resonate simultaneously in different directions associated with different axes of sensitivity (e.g., X, Y, and/or Z axes). The motion of each resonator mass is monitored through one or more electrostatically-coupled sense electrodes. An acceleration along a particular axis of sensitivity causes a small change in the electrostatic gap(s) between the corresponding resonator mass(es) and the sense electrode(s) associated with that axis of sensitivity, and this electrostatic gap change manifests as a small change in the resonance frequency of the resonator from which an accelerometer output signal can be produced.

主权项

1. A multiple-axis resonant accelerometer comprising:
a resonator comprising at least one resonator mass arranged in a device plane; a set of x-axis drive electrodes configured for driving x-axis motions of the at least one resonator mass in the device plane; a set of y-axis drive electrodes configured for driving y-axis motions of the at least one resonator mass in the device plane; a set of x-axis sense electrodes configured for sensing changes in x-axis resonance frequency of the at least one resonator mass based on electrostatic spring tuning in the presence of an x-axis acceleration; and a set of y-axis sense electrodes configured for sensing changes in y-axis resonance frequency of the at least one resonator mass based on electrostatic spring tuning in the presence of a y-axis acceleration.