MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, MANUFACTURING METHOD OF FLAT PANEL DISPLAY, DEVICE MANUFACTURING METHOD, AND MOVABLE BODY DRIVE METHOD

摘要

Provided is a substrate stage apparatus that is provided with: a substrate holder that can be moved in a plane including an X-axis and a Y-axis; a head unit that can be moved synchronously with the substrate holder along the Y-axis; an encoder system for measuring substrate position, the system including a scale disposed on the substrate holder, and heads disposed on the head unit, and acquiring the X-axis direction and the Y-axis direction position information of the substrate holder on the basis of the output of the heads; an encoder system for measuring head-unit position, the system acquiring the Y-axis direction position information of the head unit; and a position control system that controls the position of the substrate holder within the XY plane on the basis of the output of the encoder system for measuring substrate position and the encoder system for measuring head-unit position.

主权项

1. A movable body apparatus, comprising:
a first movable body movable along a predetermined two-dimensional plane which includes a first direction and a second direction orthogonal to each other; a second movable body movable synchronously with the first movable body along the first direction; a first measurement system, including a first encoder system that has one of a scale and a head disposed at the first movable body and the other of the scale and the head disposed at the second movable body, that acquires position information of the first movable body at least in the second direction on the basis of output of the head; a second measurement system that acquires position information of the second movable body in the first direction; and a position control system that performs position control of the first movable body within the two-dimensional plane, on the basis of output of the first measurement system and the second measurement system.