| 发明名称 |
EXTERNAL CLAMP RING FOR A CHECMICAL MECHANICAL POLISHING CARRIER HEAD |
| 摘要 |
An external clamp ring for a chemical mechanical polishing (CMP) carrier head having a hydrophobic coating, and a carrier head having the same are described herein. In one embodiment, an external clamp ring is provided that includes a cylindrical body having an outer cylindrical wall and an inner cylindrical wall. A hydrophobic layer disposed is on the outer cylindrical wall. |
| 申请公布号 |
US2017106496(A1) |
申请公布日期 |
2017.04.20 |
| 申请号 |
US201615176998 |
申请日期 |
2016.06.08 |
| 申请人 |
Applied Materials, Inc. |
发明人 |
ALA Patrick;DING Bo B.;HU Yongqi;YAVELBERG Simon;LARSSON Mats |
| 分类号 |
B24B37/32 |
主分类号 |
B24B37/32 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An external clamp ring for a chemical mechanical polishing carrier head, the external clamp ring comprising:
a cylindrical body having an outer cylindrical wall and an inner cylindrical wall; and a hydrophobic layer disposed on the outer cylindrical wall of the body. |
| 地址 |
Santa Clara CA US |
