SYSTEMS AND METHODS FOR ULTRAHIGH SELECTIVE NITRIDE ETCH

摘要

A method for selectively etching a silicon nitride layer on a substrate includes arranging a substrate on a substrate support of a substrate processing chamber. The substrate processing chamber includes an upper chamber region, an inductive coil arranged outside of the upper chamber region, a lower chamber region including the substrate support and a gas dispersion device. The gas dispersion device includes a plurality of holes in fluid communication with the upper chamber region and the lower chamber region. The method includes supplying an etch gas mixture to the upper chamber region and striking inductively coupled plasma in the upper chamber region by supplying power to the inductive coil. The etch gas mixture etches silicon nitride, promotes silicon dioxide passivation and promotes polysilicon passivation, The method includes selectively etching the silicon nitride layer on the substrate and extinguishing the inductively coupled plasma after a predetermined period.

主权项

1. A method for selectively etching a silicon nitride layer on a substrate, comprising:
arranging a substrate on a substrate support of a substrate processing chamber, wherein the substrate processing chamber includes an upper chamber region, an inductive coil arranged outside of the upper chamber region, a lower chamber region including the substrate support and a gas dispersion device arranged between the upper chamber region and the lower chamber region, and wherein the gas dispersion device includes a plurality of holes in fluid communication with the upper chamber region and the lower chamber region; supplying an etch gas mixture to the upper chamber region; striking inductively coupled plasma in the upper chamber region by supplying power to the inductive coil, wherein the etch gas mixture etches silicon nitride, promotes silicon dioxide passivation and promotes polysilicon passivation; selectively etching the silicon nitride layer on the substrate; and extinguishing the inductively coupled plasma after a predetermined period.