| 发明名称 |
Apparatus for generating plasma |
| 摘要 |
Provided herein an apparatus for generating plasma, the apparatus including a nozzle array, first electrode, and housing. The nozzle discharges plasma. The first electrode is disposed to surround the nozzle array. The housing is disposed to surround the nozzle array and first electrode. The nozzle includes a plurality of nozzles disposed adjacent to one another and in the form of an array, each nozzle configured to discharge plasma. Therefore, it is possible to generate a large size plasma evenly and stably. |
| 申请公布号 |
US9627167(B2) |
申请公布日期 |
2017.04.18 |
| 申请号 |
US201514631766 |
申请日期 |
2015.02.25 |
| 申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
Yu Han Young;Kim Yark Yeon;Jang Won Ick;Yoon Yong Sun;Lee Bong Kuk |
| 分类号 |
H01J7/24;H01J7/42;H05H1/36;H05H1/48;H05H1/34 |
主分类号 |
H01J7/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus for generating plasma, the apparatus comprising:
a nozzle array configured to discharge plasma; a first electrode disposed to surround the nozzle array; and a housing disposed to surround the nozzle array and the first electrode, wherein the nozzle array includes a plurality of nozzles disposed adjacent to one another in the form of an array, each nozzle configured to discharge plasma in a first direction, and wherein a cross-section, perpendicular to the first direction, of an exterior surface of each of the plurality of nozzles is polygonal. |
| 地址 |
Daejeon KR |
