ADAPTIVE CAPACITORS WITH REDUCED VARIATION IN VALUE AND IN-LINE METHODS FOR MAKING SAME

摘要

A method of making a capacitor with reduced variance comprises providing a bottom plate in a first metal layer, a first dielectric material over the bottom plate, and a middle plate in a second metal layer to form a first capacitor. The method also comprises measuring the capacitance of the first capacitor, and determining whether to couple none, one, or both of a second capacitor and a third capacitor in parallel with the first capacitor. The method may further comprise the steps of providing a second dielectric material over the middle plate, and providing a first top plate and a second top plate in a third metal layer to form the second capacitor, and a third capacitor. Electrical connections may be formed to couple one or both of the second capacitor and the third capacitor in parallel with the first capacitor based on the measured value of the first capacitor.

主权项

1. A method of making a capacitor with reduced variance in value,
the method comprising: providing a bottom plate in a first metal layer;
providing a first dielectric material over the bottom plate;providing a middle plate in a second metal layer such that the middle plate resides over the bottom plate to form a first capacitor with a first capacitance;measuring the first capacitance of the first capacitor to obtain a first measured capacitance;determining whether to couple none, one, or both of a second capacitor and a third capacitor in parallel with the first capacitor;providing a second dielectric material over the middle plate; andproviding a first top plate and a second top plate in a third metal layer such that the first top plate and the second top plate reside over the middle plate, wherein the first top plate and the middle plate form the second capacitor with a second capacitance, and the second top plate and the middle plate form the third capacitor with a third capacitance,wherein electrical connections are formed to couple one or both of the second capacitor and the third capacitor in parallel with the first capacitor if the determining whether to couple none, one, or both of the second capacitor and the third capacitor in parallel with the first capacitor results in a determination to couple one or both of the second capacitor and the third capacitor in parallel with the first capacitor.