发明名称 |
INTEGRATED CIRCUIT DEVICE AND METHOD OF FABRICATING THE SAME |
摘要 |
An integrated circuit device including a substrate having at least one fin-shaped active region, the at least one fin-shaped active region extending in a first direction, a gate line extending on the at least one fin-shaped active region in a second direction, the second direction intersecting with the first direction, a conductive region on a portion of the at least one fin-shaped active region at one side of the gate line, and a contact plug extending from the conductive region in a third direction, the third direction being perpendicular to a main plane of the substrate, may be provided. The contact plug may include a metal plug, a conductive barrier film on the conductive region, the conductive barrier film surrounding a sidewall and a bottom surface of the metal plug, the conductive barrier film including an N-rich metal nitride film, and a metal silicide film between the conductive region and the conductive barrier film. |
申请公布号 |
US2017103948(A1) |
申请公布日期 |
2017.04.13 |
申请号 |
US201615186825 |
申请日期 |
2016.06.20 |
申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
LEE Do-sun;LEE Do-hyun;KIM Chul-sung;HYUN Sang-jin;LEE Joon-gon |
分类号 |
H01L23/535;H01L27/088;H01L29/06;H01L29/78;H01L29/417 |
主分类号 |
H01L23/535 |
代理机构 |
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代理人 |
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主权项 |
1. An integrated circuit device comprising:
a substrate having at least one fin-shaped active region, the at least one fin-shaped active region extending in a first direction; a gate line extending on the at least one fin-shaped active region in a second direction, the second direction intersecting with the first direction; a conductive region on a portion of the at least one fin-shaped active region at one side of the gate line; and a contact plug extending from the conductive region in a third direction, the third direction being perpendicular to a main plane of the substrate, the contact plug including,
a metal plug,a conductive barrier film on the conductive region, the conductive barrier film surrounding a sidewall and a bottom surface of the metal plug, the conductive barrier film including an N-rich metal nitride film, anda metal silicide film between the conductive region and the conductive barrier film. |
地址 |
Suwon-si KR |