METHODS AND APPARATUSES INCLUDING ONE OR MORE INTERRUPTED INTEGRATED CIRCUIT OPERATIONS FOR CHARACTERIZING RADIATION EFFECTS IN INTEGRATED CIRCUITS

摘要

Apparatuses and methods are provided using a plurality of interrupted IC operations to detect various conditions or changes of interest to integrated circuit (IC) elements (e.g., memory cells of NAND Flash memories or floating gate transistor) such as program/erase stress, total ionizing dose, and heavy ion exposure which modify normal IC element bit state changes. An exemplary method can include controlling a plurality of selected IC elements to execute a series of PROGRAM or ERASE operations on all of the plurality of selected elements that are each interrupted or halted before a normal or first time period required for the PROGRAM or ERASE operation has elapsed. An exemplary system records a number of interrupted operations required to cause a state change in each of the plurality of selected IC elements. Embodiments of the invention enable detection of stresses far below at least some thresholds for IC element or bit cell failure.

主权项

1. A method of characterizing or detecting a predetermined condition or physical changes in an integrated circuit (IC) comprising:
providing a first device under test (DUT); providing a second device under test (DUT), wherein the first and second DUT both comprise an identical IC structure with a plurality of IC elements configured to perform one or more IC operations on or using the IC elements, wherein the first DUT is a known-good state DUT and the second DUT is an unknown state DUT; executing a plurality of configuration steps for the first DUT; executing a first plurality of interrupt processing steps on the first DUT to determine a first number of interrupted the operations required to cause at least some of the first DUT IC elements to change from a first charge state to a second charge; executing a second plurality of interrupt processing steps on the first DUT for a predetermined number of iterations to determine a final the first number of interrupted the operations for the first DUT; repeating the first plurality of interrupt processing steps on the second DUT to determine second number of interrupted the operations required to cause at least some of the first DUT IC elements to change from the first charge state to the second charge state; repeating the second plurality of interrupt processing steps on the second DUT for the predetermined number of iterations to determine a final the second number of interrupted the operations for the second DUT; determining if the predetermined condition or the physical changes have occurred in the IC based on comparing the final first and second numbers of interrupted the operations, wherein if the final second number of interrupted the operations is greater than the final first number of interrupted the operations then the predetermined condition or physical changes has occurred; wherein the plurality of configuration steps comprises:
selecting the one or more the IC operations for use in the method of characterizing or detecting the predetermined condition or physical changes in the IC, the one or more the IC operations each having a first timing value associated with an uninterrupted performance of respective the IC operations;determining an initial interrupt timing value for use in the method of characterizing or detecting the predetermined condition or physical changes associated with a triggering of an interrupt of each the one or more IC operations;selecting some or all of the plurality of IC elements for the charactering or detecting method and configuring the selected some or all the plurality of IC elements in the first charge state; wherein the first plurality of interrupt processing steps comprises:
initiating the one or more IC operations configured to change the first charge stage to the second charge state on the selected some or all of the IC elements;interrupting the initiated one or more IC operations on the selected some or all of the IC elements based on the initial interrupt timing value;reading the selected some or all of the IC elements after the interrupting step and determining if each the elements have changed from the first charge state to the second charge state;recording each the IC element that has changed to the second charge state and how many operations were required to change the element to the second charge state; wherein the second plurality of interrupt processing steps comprises repeating the first plurality of interrupt processing steps for a predetermined number of iterations.