发明名称 |
Magnetic etch stop layer for spin-transfer torque magnetoresistive random access memory magnetic tunnel junction device |
摘要 |
An apparatus includes a capping layer disposed on top of a free layer. The apparatus also includes a magnetic etch stop layer disposed on top of the capping layer. The capping layer and the magnetic etch stop layer are included in a spin-transfer torque magnetoresistive random access memory (STT-MRAM) magnetic tunnel junction (MTJ) device. |
申请公布号 |
US9620706(B2) |
申请公布日期 |
2017.04.11 |
申请号 |
US201414558103 |
申请日期 |
2014.12.02 |
申请人 |
QUALCOMM Incorporated |
发明人 |
Lee Kangho;Park Chando;Kan Jimmy;Gottwald Matthias Georg;Zhu Xiaochun;Kang Seung Hyuk |
分类号 |
H01L29/82;H01L21/02;H01L21/00;H01L43/08;H01L43/12 |
主分类号 |
H01L29/82 |
代理机构 |
Toler Law Group, PC |
代理人 |
Toler Law Group, PC |
主权项 |
1. An apparatus comprising:
a capping layer disposed on top of a free layer; a magnetic layer disposed on top of the capping layer; and an electrode layer disposed between the magnetic layer and a hard mask layer, wherein the capping layer and the magnetic layer are included in a spin-transfer torque magnetoresistive random access memory (STT-MRAM) magnetic tunnel junction (MTJ) device. |
地址 |
San Diego CA US |