SMALL THERMAL MASS PRESSURIZED CHAMBER

摘要

Embodiments described herein generally relate to a processing chamber incorporating a small thermal mass which enable efficient temperature cycling for supercritical drying processes. The chamber generally includes a body, a liner, and an insulation element which enables the liner to exhibit a small thermal mass relative to the body. The chamber is also configured with suitable apparatus for generating and/or maintaining supercritical fluid within a processing volume of the chamber.

主权项

1. A substrate processing apparatus, comprising:
a chamber body defining a processing volume for operating at elevated pressures, wherein the chamber body comprises:
a liner disposed within the chamber body adjacent the processing volume; andan insulation element disposed within the chamber body adjacent to the liner, wherein the insulation element has a coefficient of thermal expansion similar to a coefficient of thermal expansion of the chamber body and the liner; a substrate support disposed within the processing volume; and a baffle plate disposed within the processing volume.