METHODS OF FORMING METAL SILICIDES

摘要

A method of forming a metal silicide can include depositing an interface layer on exposed silicon regions of a substrate, where the interface layer includes a silicide forming metal and a non-silicide forming element. The method can include depositing a metal oxide layer over the interface layer, where the metal oxide layer includes a second silicide forming metal. The substrate can be subsequently heated to form the metal silicide beneath the interface layer, using silicon from the exposed silicon regions, the first silicide forming metal of the interface layer and the second silicide forming metal of the metal oxide layer.

主权项

1. A method of forming a metal silicide, comprising:
depositing an interface layer on exposed silicon regions of a substrate, the interface layer comprising a first silicide forming metal and a non-silicide forming element; depositing a metal oxide layer over the interface layer, wherein the metal oxide layer comprises a second silicide forming metal; and heating the substrate to form the metal silicide beneath the interface layer, the metal silicide comprising silicon from the formerly exposed silicon regions, first silicide forming metal from the interface layer, and second silicide forming metal from the metal oxide layer, wherein depositing the interface layer comprises a plurality of cycles of a vapor deposition process, each cycle of the plurality of cycles comprising alternately and sequentially contacting the surface of the substrate with a first vapor phase precursor comprising the first silicide forming metal and a second vapor phase precursor comprising the non-silicide forming element, wherein the first vapor phase precursor reacts with the second vapor phase precursor.