Sensor for sensing one fluidum, comprising a 2DEG layer stack and a gate and the use of such sensor

摘要

Sensor (1) for sensing the presence of at least one fluidum in a space adjoining the sensor (1), comprising a 2DEG (6) (two-Dimensional Electron Gas) layer stack (2), a gate (5) electrode overlaying at least part of the 2DEG layer stack (2) for electrostatically controlling electron density of a 2DEG (6) in the 2DEG layer stack (2) and a source (3) and a drain (4) electrode contacting the 2DEG layer stack (2) for electrically contacting the 2DEG (6), characterized in that a detection opening (7) is provided in between the gate (5) electrode and the 2DEG layer stack (2) and in that the detection opening (7) communicates with the space through a detection opening inlet (13) such that molecules of the fluidum can move from the adjoining space through the detection opening inlet (13) into the detection opening (7) where they can measurably alter a electric characteristic of the 2DEG (6).