发明名称 |
Electronic device and method for fabricating the same |
摘要 |
An electronic device includes a semiconductor memory that includes: an inter-layer dielectric layer which is formed over a substrate; a contact plug which is coupled with the substrate by passing through the inter-layer dielectric layer and has a protruding portion over the inter-layer dielectric layer; a first variable resistance pattern which is formed over the contact plug; and a protective layer which covers the first variable resistance pattern and a portion of sidewalls of the contact plug in such a manner that the sidewalls of the contact plug are exposed. |
申请公布号 |
US9614008(B2) |
申请公布日期 |
2017.04.04 |
申请号 |
US201514981727 |
申请日期 |
2015.12.28 |
申请人 |
SK hynix Inc. |
发明人 |
Do Kwan-Woo;Park Ki-Seon |
分类号 |
H01L27/115;H01L27/24;H01L27/22;H01L43/08;H01L45/00;H01L43/02;G11C13/00;H01L27/105 |
主分类号 |
H01L27/115 |
代理机构 |
Perkins Coie LLP |
代理人 |
Perkins Coie LLP |
主权项 |
1. An electronic device comprising a semiconductor memory that includes:
a substrate; an inter-layer dielectric layer which is formed over the substrate; a contact plug which is coupled with the substrate by passing through the inter-layer dielectric layer and has a protruding portion over the inter-layer dielectric layer; a first phase change pattern which is formed over the contact plug; and a protective layer which covers the first phase change pattern and a portion of sidewalls of the contact plug in such a manner that exposes a remaining portion of the sidewalls of the contact plug. |
地址 |
Icheon-Si KR |