| 发明名称 |
Calcium fluoride optical member, manufacturing method therefor, gas-holding container, and light source device |
| 摘要 |
There is provided a calcium fluoride optical member formed from monocrystalline calcium fluoride and having a tubular shape. A {110} crystal plane or a {111} crystal plane of the monocrystalline calcium fluoride is orthogonal to a center axis of the tube. |
| 申请公布号 |
US9613791(B2) |
申请公布日期 |
2017.04.04 |
| 申请号 |
US201615245716 |
申请日期 |
2016.08.24 |
| 申请人 |
NIKON CORPORATION |
发明人 |
Uehara Naoyasu;Kageyama Motofusa |
| 分类号 |
H01J61/30;H01J61/62;H01J63/08;C01F11/22;C30B29/12;C30B29/66;B65D51/24 |
主分类号 |
H01J61/30 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A calcium fluoride optical member formed from monocrystalline calcium fluoride and having a tubular shape,
wherein a {110} crystal plane or a {111} crystal plane of the monocrystalline calcium fluoride is orthogonal to a center axis of the tube. |
| 地址 |
Tokyo JP |
