| 摘要 |
A drive unit 33 of a stage device 11 comprises: a box body 35 having a rectangular shape in plan; a base 37; a pair of X-axis linear motors 39, 39; and a pair of Y-axis linear motors 41, 41. An X-axis stator is disposed on each of two mutually opposing X-axis direction side walls 43 of the box body 35, wherein magnetic attractions that draw respective X-axis rotors toward the X-axis stator side (Y-axis direction) cancel each other out between the pair of X-axis linear motors 39. A Y-axis stator is disposed on the inside of each of two mutually opposing Y-axis wall members 37b, wherein magnetic attractions that draw respective Y-axis rotors toward the Y-axis stator side (X-axis direction) cancel each other out between the pair of Y-axis linear motors 41. |
