EROSION RESISTANT ELECTRODES FOR USE IN GENERATING GAS DISCHARGE LASER

摘要

Anodes and cathodes for use in generating gas discharge laser light are disclosed. The improved anode has a transition portion that includes a substantially vertical sidewall to transition between the active portion and the end portion to reduce erosion-related issues. The improved cathode has thickened spine portions in enhanced erosion locations. The spine portions are thickened by removing material from the shoulder of the cathode stepped cross-section profile in those locations in order to improve the longevity of the cathode.

主权项

1. An elongated erodable electrode for use in generating gas discharge laser, said electrode having a base plane, said base plane parallel to an X-Y plane formed by an x-direction and a y-direction orthogonal to said x-direction, said electrode elongated along said x direction, comprising
an active portion spanning a first portion of said electrode along said x direction, said active portion having an active portion top surface, said active portion having a first thickness measured along a z direction orthogonal to both said x direction and said y direction, said active portion having a first stepped cross-section profile parallel to a Y-Z plane formed by said z direction and said y direction; an end portion spanning a second portion of said electrode along said x direction, said end portion having an end portion top surface, said end portion having a second thickness measured along said z direction, wherein said second thickness is less than said first thickness; and a transition structure, wherein said transition structure includes substantially vertical sidewall connecting said end portion top surface with said active portion top surface, said substantially vertical sidewall being substantially parallel to said z direction.